Such batteries are based on liquid electrolytes (thickness ∼25 μm due to the separator) and usually have electrode thicknesses in the order of ∼50–60 μm ( Singh et al., 2015). Several research groups have reported LIBs with energy densities greater than 500 Wh kg −1 ( Liu et al., 2019 Park et al., 2019 Han et al., 2020 Qiao et al., 2020). For more than two decades, there has been tremendous research in the LIB field because of their high energy and power density. The growing demands of electric vehicles and portable electronics have now significantly stimulated the development of energy storage devices such as lithium ion batteries (LIBs). Usage of renewable energies, such as solar energy, wind energy, ocean energy, or geothermal energy, is often limited by location and meteorological conditions, which is the reason why energy-storage solutions are needed to support the energy economy. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode–electrolyte interface, are discussed.Īs the world’s population grows and environmental issues become more serious, it is important to find a safer, more reliable, and robust energy supply to replace conventional fossil fuels. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. 4Institute of Batteries LLC, Nur-Sultan, Kazakhstan.3Research Institute for Energy Equipment Materials, Hebei University of Technology, Tianjin, China.2Department of Chemical and Materials Engineering, Nazarbayev University, Nur-Sultan, Kazakhstan.1National Laboratory Astana, Nazarbayev University, Nur-Sultan, Kazakhstan.Berik Uzakbaiuly 1,2* Aliya Mukanova 1,2 Yongguang Zhang 3 Zhumabay Bakenov 1,2,4*

Nmc cathode xps